Development of technology of superconducting multilevel wiring in speed GaAs structures of LSI/VLSI Journal title: Восточно-Европейский журнал передовых технологий Authors: Stepan Novosiadlyi, Myhaylo Kotyk, Bogdan Dzundza, Volodymyr Gryga, Sviatoslav Novosiadlyi Subject(s):