3D Simulation of Fin Geometry Influence on Corner Effect in Multifin Dual and Tri-Gate SOI-Finfets.
Journal Title: International Journal of Nano Studies & Technology (IJNST) - Year 2013, Vol 2, Issue 4
Abstract
In this work the corner effect sensitivity to fin geometry variation in multifin dual and tri-gate SOI-FinFETs is studied through a commercial, three-dimensional numerical simulator ATLAS from Silvaco International [1]. These devices are compatible with conventional silicon integrated circuit processing, but offer superior performance as the device is scaled into the nanometer range. This study aims wider to use multiple fins between the source and drain regions. The results indicate that for both multifin double and triple gate FinFETs, the corner effect does not lead to an additional leakage current and therefore does not deteriorate the SOI-FinFET performance.
Authors and Affiliations
A N Moulai Khatir
Keywords
Related Articles
- EP ID EP201475
- DOI 10.19070/2167-8685-130006
- Views 122
- Downloads 0
Review of Nanomedicine
Review of Nanomedicine
Synthesis of Cox Ni1-XFe2 o4 (X = 0.0, 0.5, 1.0) Nanoparticles by Chemical Co-Precipitation Route
Magnetic nanoparticles (NPs) of nickel-cobalt ferrite (Cox Ni1-xFe2 O4 ; x = 0.0, 0.5, 1.0) were synthesized by co-precipitation route. The chemicals used were nickel chloride, cobalt chloride, ferric chloride, sodium hy...
Removal of Heavy Metals by Indigenous Microorganisms and Identification of Gene Responsible for Remediation
The present study deals with the removal of heavy metals from solid waste disposal sites. The waste generated from the small scale industrial operations such as grinding, milling, cutting, rubbing, painting, washing are...
Structural and Chemical Research of Coordination Compounds of Hexaaqua Bisbenzol-1, 2, 4, 5-Tetracarbonate Diiron (II) With A Layered-Porous Structure, For Heavy Crude Oil
The complex compounds of diiron (II) bisbenzoll, 2, 4, 5 tetracarbonate were synthesized for the first time with porous structure. This article presents the results of X-ray diffraction, elemental and IR analyzes of spec...
Photoelectric Characteristics of Nano TiO2 Film Prepared By Spraying Pyrolysis Method
The nanocrystalline TiO2 (nc TiO2 ) film was prepared by spraying pyrolysis method. Starting material for the synthesis was TiCl4. Phase compositions and crystalline sizes were examined by pattern of XRD, and surface mor...