A Phenomenological Analysis of MEMS-Based Sensor for Toxic Gas Sensing in Coal Mine
Journal Title: International Journal of Engineering Sciences & Research Technology - Year 30, Vol 2, Issue 6
Abstract
In coal mine different types of toxic gases are present. There is an increasing demand on toxic gas sensor for coal mine where the power consumption is a big issue. In this paper a simple structure of micro heater and inter digited electrode has been fabricated and micro machined structure for low power consumption is demonstrated. MEMS microheaters are designed and fabricated for entire two inch (2") process and 3mm X 3mm die sized microheaters obtained.
Authors and Affiliations
Santanu Maity
Keywords
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