Analysis of the effects of the dimensions and type of micro pump on the pull-in voltage caused by the vibration of the diaphragm in contact with fluids
Journal Title: Journal of Science and today’s world - Year 2016, Vol 5, Issue 5
Abstract
Nowadays because of the advancement of technology, and the ever-increasing inclination toward small equipment, many researches regarding micro and Nano systems have been performed. The current study is about Micro Electro-Mechanical Systems (MEMS). The micro pump is modeled to analyze its vibrational behavior. And, pressure caused by the fluid adjacent to the structure is modeled. Finally, the changes in pull-in voltages caused by the vibrations of the rounded diaphragm in contact with the fluid in various dimensions and types of micro pumps are analyzed. The micro pump under analysis contains a cylindrical chamber with rigid walls and bottom, and a in-out valve, and a micro-elastic rounded plane in the upper part that is stimulated by electrostatic force. Because of the presence of fluid in the chamber, the rounded diaphragm is in contact with the fluid, and therefore the issue considered is the interference of the structure and the fluid. Furthermore, for modeling the active fluid, the viscosity and compressibility of the fluid is ignored, and the linear Bernoulli equation was used to calculate the pressure caused by the fluid on the micro plane. Initially, the system’s frequency response, in the form of a matrix, was extracted by applying a constant voltage and using the Fourier-Bessel method, and the effects of bias voltage and different fluids on the frequency behavior of the system was analyzed. Considering that during the operation of the micro pump (harmonic stimulation of the diaphragm) the instability of the system is possible, before analyzing the analysis of the frequency behavior of the system, the transient behavior and the instability threshold of the system was analyzed. In the above analysis it was shown the behavior of the system and its stability threshold follows the geometric dimensions and the type of active fluid.
Authors and Affiliations
S. Ghafarpour, R. Shabani
Keywords
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