CREATING OF PERIODIC STRUCTURES WITH DIRECT LASER INTERFERENCE LITOGRAPHY

Abstract

In this article a direct laser interference lithography method is described. This method is one of the best solutions for top surface of material modifications – changes of topography and microstructure. These changes lead to many beneficial modifications of material properties from mechanical ones like change of friction coefficient to change of optical or magnetic properties etc. In the article we introduce laser system based on Nd:YAG crystal with Q-modulation, generating pulses of 8-10 ns duration with maximal energy 1,5 J in each channel. The laser was used to produce interference structures on surfaces of photo-active materials. Two chanels of interferometer laser system make simultaneously Mach-Zehnder interferometer. We intruduce periodical structures (1D and 2D) created on surfaces of polimers, metals, and DLC type surfaces. In the conclusion, possible practical applications of manufactured structures are shown.<br/><br/>

Authors and Affiliations

Krzysztof Czyż, Antoni Rycyk, Marek Strzelec, Jan Marczak

Keywords

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  • EP ID EP68457
  • DOI -
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How To Cite

Krzysztof Czyż, Antoni Rycyk, Marek Strzelec, Jan Marczak (2014). CREATING OF PERIODIC STRUCTURES WITH DIRECT LASER INTERFERENCE LITOGRAPHY. Proceedings of Electrotechnical Institute Prace Instytutu Elektrotechniki, 61(266), 99-113. https://europub.co.uk/articles/-A-68457