Design and Simulation Elements of Analytical Microsystem-on-Chip With the Structures "Silicon-on-Insulator"
Journal Title: Фізика і хімія твердого тіла - Year 2016, Vol 17, Issue 2
Abstract
In this paper the results of architecture development, layout designof analytical microsystem-on-chip with the structures "silicon-on-insulator" (SOI) and its elements schemotechnical computer simulation for determine their electrical and time characteristics are presented. Keywords: analytical microsystem-on-chip, silicon-on-insulator structure, gate array, ring oscillator.
Authors and Affiliations
V. V. Dovgiy, I. T. Kohut, V. I. Golota
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