Design and Simulation of MEMS based Microhotplate as Gas Sensor
Journal Title: International Journal of Advanced Research in Computer Engineering & Technology(IJARCET) - Year 2013, Vol 2, Issue 8
Abstract
MEMS based Microhotplates plays an important in gas sensing applications. In this paper, we present the simulation results of a MEMS micro-hotplate. The electro-thermo-mechanical behaviors of micro- hotplates (MHP) have been simulated using COMSOL Multiphysics. A low cost nickel alloy DilverP1 (alloy of Ni, Co, Fe) having high resistivity 49x10-8Ωm is used as heating element. The effect of various thicknesses of heating element on the temperature, displacement, and power consumption of the MHP is evaluated. Results show that as the thickness of the heating element is increased from 0.25 μm to 2 μm, the power consumption of the MHP increases from 4.6mW to 37mW at 0.8 V with a square cavity in silicon membrane. Two different patterns of micro-heaters which are curved spiral over the silicon membrane with and without cavity are also demonstrated. A comparison between the power consumption of different materials is also analyzed in the presented work. At the end of the paper a complete metal oxide gas sensor using sensing layer of ZNO is simulated
Authors and Affiliations
Monika , Dr. Arti Arora
Keywords
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