Examination of smooth surfaces roughness using angle scatterometer. Part 1. The method of measurement. The measurement instrument

Journal Title: Bulletin of the Military University of Technology - Year 2015, Vol 64, Issue 1

Abstract

The basic parameters of surface roughness are described in this article. The method of calculation of these parameters from measurement of BSDF function characterizing scatter from surface is shown. Automated angle scatterometer, built at the Institute of Optoelectronics of the Military University of Technology (IOE MUT), used for measurements of above parameters is described.[b]Keywords[/b]: surface roughness, scattering, BSDF function, scatterometer

Authors and Affiliations

Andrzej Pawlata

Keywords

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  • EP ID EP62741
  • DOI -
  • Views 71
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How To Cite

Andrzej Pawlata (2015). Examination of smooth surfaces roughness using angle scatterometer. Part 1. The method of measurement. The measurement instrument. Bulletin of the Military University of Technology, 64(1), 47-58. https://europub.co.uk/articles/-A-62741