Influence of the C4H6O6 Concentration in the (NH4)2Cr2O7 - HBr- C4H6O6 Composition on the Chemical-Dynamic Polishing of the III-V Semiconductors
Journal Title: Фізика і хімія твердого тіла - Year 2016, Vol 17, Issue 4
Abstract
The paper presents the results of experimental determination of the influence of the initial concentration of tartaric acid on the features of the chemical interaction of InAs, InSb, GaAs and GaSb with (NH4)2Cr2O7 - HBr- C4H6O6 etching solutions. It was established that C4H6O6 decreases the general crystals dissolution rate because it increases the etching compositions viscosity, and also enhances the polishing properties of the etching solutions. The comparative analysis of the etching mixtures composition changes influence demonstrates that the using of 40 % C4H6O6, in comparison with 27 %, provides the higher quality polishing of the crystals surface.
Authors and Affiliations
I. V. Levchenko, I. B. Stratiychuk, V. M. Tomashyk, G. P. Malanych
Keywords
Related Articles
- EP ID EP261802
- DOI 10.15330/pcss.17.4.604-610
- Views 73
- Downloads 0
Crystalline, Magnetic and Domain Structure of Epitaxial Ferrite-Garnet Films (Review)
The article gives a literary review of the current state of research of ferrite-garnet films. The basic crystalline and magnetic characteristics of thin films of iron-yttrium garnet are considered. We analyzed the causes...
Гідротермальний синтез 3D наночасток дисульфід молібдену/ вуглець
В роботі представлено результати присвячені синтезу 3D багатошарових наночасток дисульфід молібдену / вуглець методом гідротермального синтезу з застосуванням в якості міцелоутворювача катіонів цетилтриметиламонію. Елеме...
Topology of Surface of ZnO thin Oxide Film Formed on GaSe Layered Crystal Surface
Heterostructure n-ZnO ( p-GaSe was prepared by the magnetron sputtering method. Topology of surface of ZnO thin oxide film formed on freshly cleaved surface of GaSe layered crystal was investigated; sensitivity spectral...
Optical Absorption and Piezoelectric Effect Investigation in Single Crystal of AgGaGe3Se7.6Te0.4 Solid Solution
In present work spectral distribution of absorption coefficient in the range of 100 – 300 K was investigated and band gap values evaluated. Parameters of Urbach rule were calculated and linearity of temperature dependenc...
Relationship Between Contact Angle and Sliding Angle of Drop on Inclined Surface
The Frenkel’s task for relationship of equilibrium contact angle and sliding angle of drops on inclined surfaces has been considered. A linear dependency of inverse sinus of sliding angle and mass of the drop in power 2/...