КОНТРОЛЬ ТЕМПЕРАТУРИ В УСТАНОВКАХ РЕАКТИВНОГО ІОННО-ПЛАЗМОВОГО НАПИЛЕННЯ З ВИКОРИСТАННЯМ ТЕРМОМЕТРА ВИПРОМІНЕННЯ
Journal Title: Вимірювальна техніка та метрологія - Year 2011, Vol 1, Issue 72
Abstract
The process of creation of elements of microelectronics on the base of process of ion – plasma spraying process needs continuous control of lining temperature. In the article the use is offered for this thermometer of radiation. The features of measuring of temperature of lining of radiation thermometer are considered in the process of spraying process.
Authors and Affiliations
Наталія Гоц, Юрій Кривенчук
Keywords
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