NANO-POROUS ALUMINA HUMIDITY SENSORS
Journal Title: Metrology and Measurement Systems - Year 2008, Vol 15, Issue 2
Abstract
In this paper the details of porous alumina humidity sensors fabricated using anodic aluminium oxidation are presented. The main aim of this study is to establish relations between technological process parameters and electrical properties of sensors. Surface morphology was investigated by scanning electron microscopy. Impedance spectroscopy was used to identify electrical parameters of the sensor
Authors and Affiliations
GRZEGORZ JASIŃSKI, PIOTR JASIŃSKI, BOGDAN CHACHULSKI
Keywords
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