IDENTICAL PARALLEL BATCH PROCESSING MACHINES BASED ON ACO MULTI-OBJECTIVE SCHEDULING
Journal Title: International Journal of Engineering Sciences & Research Technology - Year 2015, Vol 4, Issue 12
Abstract
In this paper, the Batch Processing Machine (BPMs) and its scheduling problem in a semiconductor wafer fabrication facility (fab) has been focused ,where in there are many BPMs, such as diffusion machines, oxidation machines and dry strip machines. The jobs processed on those machines cannot be batched together unless they use they have the same recipe of those BPMs. As a result, the scheduling problem of those BPMs is abstracted as identical PBPM with incompatible job families. In a fab, because most of upstream and downstream machines of the BPMs are non-BPMs, jobs must be batched or split regularly during their fabrication processes. Therefore, a good scheduling solution of those BPMs is important to efficiently utilize their capacity and satisfy the requirements of their downstream machines to balance the fab-wide workload and achieve better fab-wide operational performance.
Authors and Affiliations
Rutuja Kulkarni
Keywords
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- EP ID EP111988
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