Study of MEMS Resonator with Different Stress level and its Applications
Journal Title: International Journal of Engineering Sciences & Research Technology - Year 30, Vol 3, Issue 9
Abstract
In this paper we present the general idea about the stress levels of mems resonator with different type of materials used in designing of MEMS resonator. Today with development of nanotechnology MEMS resonator is to be designed and used as an oscillator. Because this is due to their excellent features like small size (in microns), large frequencyquality factor product, low power consumption, low cost batch fabrication.Instead of this, quartz oscillator are large in size (in centimeters).According to different properties of mems materials, the stress level of MEMS resonator is to be changed because the displacement of the cantilever beam is to be varied. So, by altering the material properties of MEMS resonator beam displacement can be increased.
Authors and Affiliations
Manju Rani*
Keywords
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