Abstract

Microelectromechanicalsystem (MEMS) technology have led to the development of optical devices with a large number of application areas. The reason is the unique MEMS characteristics that are its fabrication, system integration, and operation of micro-optical systems. The precision mechanics of MEMS micro-fabrication techniques, and optical functionality all make possible a wide variety of movable and tunable mirrors, lenses, filters, and other optical structures. The large number of electromagnetic modes that can be accommodated by beam-steering micro-mirrors and diffractive optical MEMS, combined with the precision of these types of elements, is utilized in fiber-optical switches and filters, including dispersion compensators. The potential to integrate optics with electronics and mechanics is a great advantage in biomedical instrumentation. Micro-optical systems also benefit from the addition of nanostructures to the MEMS toolbox. Photonic crystals and micro-cavities, which represent the ultimate in miniaturized optical components, enable further scaling of optical MEMS.

Authors and Affiliations