Peculiarities of nanocrystalline silicon films growth on porous anodic alumina surface
Journal Title: Semiconductor Physics, Quantum Electronics and Optoelectronics - Year 2017, Vol 20, Issue 3
Abstract
The influence of porous alumina template morphology on silicon films growth at deposition by PE CVD has been investigated. As it was shown, the structural properties of silicon phases depend on the pore geometry and surface morphology of the anodized porous alumina substrate. In case of porous alumina formation in one stage, ripple-like morphology takes place. The growth of a-Si:H film is observed at deposition. After two-stage anodization, the porous alumina has tipped/ribbed morphology. In this case, usually a-Si:H film grows on the bottom of the pores, and nc-Si:H/a-Si:H one grows on the tips. In the case of deep pores, the nanocrystalline nc-Si:H film grows only above the top of the pores. The obtained results could be used when developing new types of photocells, sensors, nanophotonics and ionics devices.
Authors and Affiliations
P. V. Parfenyuk, A. A. Evtukh, I. M. Korobchuk, V. I. Glotov, V. V. Strelchuk
Keywords
Related Articles
- EP ID EP232875
- DOI 10.15407/spqeo20.03.330
- Views 88
- Downloads 0
Possible method for evaluation of virus, bacteria and yeasts infectivity by optical measurements
The possible method for evaluation of virus, bacteria and yeasts infectivity based on study of their absorption spectra has been proposed. The decrease in the samples infectivity was caused by adding the CeO2 nanoparticl...
Dielectric spectroscopy of CuInSe2 single crystals
The results of high-frequency dielectric measurements with obtained α-CuInSe2 single crystals provided an opportunity to determine the mechanisms of dielectric losses and charge transport, and also to evaluate the densit...
Nanograin boundaries and silicon carbide photoluminescence
The luminescence spectra of SiC crystals and films with grain boundaries (GB) on the atomic level were observed. The GB spectra are associated with luminescence centers localized in areas of specific structural abnormali...
Using nanosphere lithography for fabrication of a multilayered system of ordered gold nanoparticles
New modification of nanosphere lithography has been realized to obtain multilayered systems of ordered gold nanopartciles (NP). NP have been formed using vacuum deposition of 5…60-nm layer of gold on ionic etched multila...
Optical properties of ternary alloys MgZnO in infrared spectrum
Properties of thin films of ternary alloys Mg х Zn 1–х O on the optically-anisotropic Al 2 O 3 substrates in the area of “residual rays” of film and substrate are first investigated using the method of infrared spectrosc...