STABILIZATION OF SELECTED PARAMETERS ELECTRON BEAM ION SOURCES
Journal Title: Informatyka Automatyka Pomiary w Gospodarce i Ochronie Środowiska - Year 2012, Vol 2, Issue 4
Abstract
This paper presents an overview of the vacuum measurement instruments using electron – impact gas ion sources, especially examples of the ion sources and biasing systems. Based on the analysis results a new thermionic emission current detection method to implementation in stabilizer of ionizing beam intensity and electron energy has been proposed.
Authors and Affiliations
Dariusz Kuś, Jarosław Sikora
Keywords
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