THE PRODUCTION OF THIN FILMS BY THE DUAL-SPUTTERING METHOD AND THEIR INVESTIGATION
Journal Title: Вчені записки Таврійського національного університету імені В. І. Вернадського. Серія: Технічні науки - Year 2018, Vol 29, Issue 1
Abstract
Almazopodbnyi Vuglecev (DLC) plivki i gybridnyi plivki diamond-studded volgecnye with organichnimi halfimerami (DLC-p-h) otrimul z vichoristannyam method of magnetron dual rozpilenya, the characteristics of the blend were made using the methods of combinational radiation (NLS) and nanoindentification.
Authors and Affiliations
Л. В. Кричковська, В. Л. Дубоносов
Keywords
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