Accurate Dielectric Capacitance Determination from MetalInsulator-Semiconductor Devices Having Bias and Frequency Dependent Conductance Due To Leakage Current
Journal Title: IOSR Journals (IOSR Journal of Electrical and Electronics Engineering) - Year 2017, Vol 12, Issue 1
Abstract
A model for MIS device in accumulation is proposed which includes a bias and frequency dependent conductance in parallel with the insulator capacitance due to the leakage current. The model is validated by experimental results on MOS structures fabricated on n<100>Si having about 9 nm dry thermal oxide. The real and imaginary impedance versus frequency plots of such MOS device having large conductance can be used to determine accurately the oxide capacitance and consequently the oxide thickness without the use of ellipsometer. Greatly reduced MIS dot area can assist in avoiding frequency dispersion in accumulation capacitance, particularly at small-signal frequency of 1 MHz which is commonly used for generating high frequency C-V plots.
Authors and Affiliations
Ravi Kumar Chanana
Keywords
Related Articles
- EP ID EP388991
- DOI 10.9790/1676-1201010105.
- Views 134
- Downloads 0
An Approach Using Sudden Change in Geometrical Shape of a Sample for Fabricating Micro Materials Utilizing Electromigration
The utilization of electromigration of induced micro materials in passivated aluminum films was investigated. The experimental sample was a passivated polycrystalline Al line with a hole using sudden change in geometrica...
Structural and Optical Characterization of CdS Nanoparticles Grown in Different Solvents
In the present work a chemical method is followed to grow CdS nanoparticles at room temperature by varying the growth time as well as solvents. Anhydrous CdCl2, Sulphur powder,sodium borohydride powders are used as react...
Comparative Analysis of Integrating WECS with PMSG and DFIG Models connected to Power Grid Pertaining to Different Faults
In the present centaury wind propelled power generator has become the most challenging with the power system in terms of power quality and harmonic distortion control. These challenges are now overtaken by the advancemen...
Low Latency Ifft Design for Ofdm Systems
OFDM is a multi carrier modulation technique used in the various digital communication systems like 3G GSM, WiMAX, and LTE etc. The main advantage of this transmission technique is their hardiness to channel fading in wi...
Electronic simulation of the control of a sub-actuated robotic hand
The present study has as principal objective to simulate the control of sub-actuated robotic hand, using resistive sensors capable of interpreting finger movements and converting them into electrical signals, sending the...