Anisotropic Dry Etching (RIE) for Micro and Nanogap Fabrication
Journal Title: International Journal of Modern Engineering Research (IJMER) - Year 2012, Vol 2, Issue 1
Abstract
The main objective of this research is to develop a micro and nanogap structure using dry anisotropic etching –Reactive Ion Etching- RIE. Amorphous silicon material is used in the micro and nanogap structure and gold as electrode. The fabrication processes of the micro and nanostructure are based on conventional photolithography, wet etching for the Al pattern and wet etching for a-Si pattern using RIE process. Reactive ion etching (IP-RIE) has been applied and developed as essential method for etching micro and nanogap semiconductors.
Authors and Affiliations
Th. S. Dhahi, U. Hashim
Keywords
Related Articles
- EP ID EP94398
- DOI -
- Views 127
- Downloads 0
High Heat Flux Micro-Electronics Cooling
Abstract: The temperature of an electronics device rises fairly linearly with increasing device heat flux. This relationship is especially problematic for defense electronics, where heat dissipation is projected to...
A DATA MINING ANALYSIS & APPROACH WITH INTRUSIONDETECTION / PREVENTION FROM REAL
Abstract: We propose a mechanism for false positive/negative assessment with multiple IDSs/IPSs to collect FP and FN cases from real-world traffic and statistically analyze these cases. False positives and false n...
DESIGN AND ANALYSIS OF AMLA PUNCHING MACHINE
In India, amlas are produced on a large scale which is used for various purposes such as making murraba, pickles, etc. But the method of making murabba by manual method is less efficient and not suitable to ma...
STATCOM for Improved Dynamic Performance of Wind Farms in Power Grid
Application of FACTS controller called Static Synchronous Compensator STATCOM to improve the performance of power grid with Wind Farms is investigated .The essential feature of the STATCOM is that it has the abilit...
Hopf-Bifurcation Ina Two Dimensional Nonlinear Differential Equation
In this paper we have investigated the stability nature of Hopf bifurcation in a two dimensional nonlinear differential equation.Interestingly, our considered model exhibits both supercritical and subcritical Hopf bifurc...