Design and Analysis of MEMS Switch for RF Applications
Journal Title: International Journal of Scientific Research and Management - Year 2015, Vol 3, Issue 1
Abstract
This paper describes the design process of MEMSswitch and analysis of the MEMS switch structures for finding certain switch parameters to develop a highperformance RF MEMS switch w ith low voltage, low insertion loss and high isolation.The RF MEMS switchis designed using physical level approach by using 3DMEMS commercial software package s COMSOL Multiphysics and Intellisuite. Theoptimization analysis is also simulated to obtain the low voltage by adjusting the air gap distance and top electrode designstructure. The RF performance is then simulated using theelectromagnetic analyzer, Emag to calculate the insertion loss andisolation value during the ON and OFF state conditions respectively . Severaldesigns are proposed and the best performance switch gives a low voltage actuation of 4 V with low loss of 8 dB and high isolation of - 40 dB at 1.5 GHz. The switch resistance of single switch is high. In order to reduce the effective switch resistance, 10 miniature RF MEMS switches have been placed in paralleland result i n switch resistance of 5.9 Ω
Authors and Affiliations
K. Balaji
Keywords
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