FORMATION OF NANOPOROUS AL2O3 FILMS
Journal Title: Сенсорна електроніка і мікросистемні технології - Year 2016, Vol 13, Issue 4
Abstract
This paper presents the results on formation of the porous Al2 O3 films in solutions of phosphoric and oxalic acids. Experimental samples with nanoporous Al2 O3 films in case of aluminum layers thinner than 2 mm were obtained only in the solution of oxalic acid. The resulting porous Al2O3 films have the following geometric parameters: pore diameter from 20 to 35 nm, the distance between the pores from 70 to 150 nm depending on anodizing voltage. However, the matrix of pores in Al2O3 film is not quite ordered and ordering is observed only on small areas
Authors and Affiliations
A. Yu. Kizjak, A. A. Evtukh, O. V. Steblova
Keywords
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- EP ID EP397138
- DOI 10.18524/1815-7459.2016.4.86662
- Views 68
- Downloads 0
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