INFLUENCE OF THE PVD PROCESS PARAMETERS ON ZNO: AL THIN FILMS
Journal Title: Applied Engineering Letters - Year 2017, Vol 2, Issue 1
Abstract
In recent years a growing interest in searching new material for producing Transparent Conductive Layers (TLC) is observed. ZnO:Al thin films are this type material, interesting due to wide range of potential applications where it can be applied like: transparent electrodes, gas sensors, thin film transistors, sensor devices, electroluminescent diodes and others. The aim of this paper is to discuss influence of the ZnO:Al film deposition parameters of PVD magnetron sputtering method on TCL structure and its chemical composition. It contains description of the ZnO:Al PVD magnetron sputtering deposition method. It discusses results obtained from the analysis of the microstructure of ZnO:Al thin films using a high resolution scanning electron microscope, layers' surface topography determined with atomic force microscope and results of chemical composition analyses.
Authors and Affiliations
Paulina Boryło, Krzysztof Matus, Marek Szindler, Klaudiusz Gołombek
Keywords
Related Articles
- EP ID EP222876
- DOI -
- Views 96
- Downloads 0
ANALYSIS OF DRY SLIDING WEAR BEHAVIOUR OF AL 6061- COCONUT SHELL ASH METAL MATRIX COMPOSITES USING STIR CASTING
Al6061 with hard particle reinforcement contains higher stiffness, maximum strength and wear resistance when compare to unreinforced alloy. They can be usage for self-propelled automotive components and aircraft construc...
SYSTEM IDENTIFICATION BASED INVERSE KINEMATICS ANALYSIS AND CONTROL OF A MULTI‐DOF ROAD SIMULATOR
This paper presents, system identification based inverse kinematics analysis and control of a multi‐DOF road simulator. Multi‐DOF road simulators are special devices which are widely used to perform road profiles to a ve...
AN INTEGRATED APPROACH FOR DESIGN AND MANUFACTURE OF PLASTIC PRODUCTS
The aim of this paper is to present an integrated design procedure for plastic part development and manufacture. Reverse engineering (RE), re-engineering (ReE) and mold design have been incorporated to infuse agile chara...
THE BUCKLING ANALYSIS OF A RECTANGULAR PLATE ELASTICALLY CLAMPED ALONG THE LONGITUDINAL EDGES
The paper analyses the stability of a rectangular plate which is elastically buckled along longitudinal edges and pressed by equally distributed forces. A general case is analyzed – different stiffness elastic clamping a...
OPTIMIZATION OF EFFICIENCY OF WORM GEAR REDUCER BY USING TAGUCHI-GREY METHOD
In this paper the efficiency and output power are considered, as the most important characteristics of the worm gear reducer, and their optimization was performed. As the influencing factors, the viscosity of the lubrica...