INVESTIGATION OF CAPACITIVE CONVERTERS STRUCTURE BASED ON AL/ITO/POLYIMIDE/AL2O3 THIN-FILM COMPOSITION
Journal Title: Сенсорна електроніка і мікросистемні технології - Year 2015, Vol 12, Issue 2
Abstract
The article considers the key issue of metal parts liquid free acoustic control and proposed innovative solutions for defectoscopy in industrial production. The main feature of the solution is using flexible thin-film capacitive transducers based on the ITO/polyimide/Al2O3 structure with total thickness less than 20 microns. Based on the research of structural and electrical properties of layers with such structure it has been established the optimal conditions to maximize the efficiency of their using as capacitive transducers. A prototype of thin-film capacitive transducer for metal parts acoustic control on the basis of Al/ITO/polyimide/Al2O3 composition it has been manufactured.
Authors and Affiliations
L. V. Zaitseva, G. S. Khrypunov, R. V. Zaitsev, B. M. Gorkunov, A. L. Khrypunova
Keywords
Related Articles
- EP ID EP399189
- DOI 10.18524/1815-7459.2015.2.73666
- Views 72
- Downloads 0
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