Investigation of transparent conductive multilayer film with Ag
Journal Title: International Journal of engineering Research and Applications - Year 2017, Vol 7, Issue 12
Abstract
Recently, transparent conductive oxide films (TCOs) have been used for their application as plastic substrates that can be applied to flexible devices. We focus on transparent conductive films with TCO/metal/TCO multilayer structures. In this study, an AZO/Ag/AZO multilayer film was deposited on a PEN substrate by RF magnetron sputtering (for AZO layer) and electron beam evaporation (for Ag layer). The resistivity of multilayer films decreased considerably compared to single AZO films. The XRD spectra revealed that the resistivity of the multilayer film was barely affected by the crystallinity of AZO. An increase in the carrier concentration caused by Ag affects was also observed. Furthermore, the transmittance of the multilayer film was improved owing to an increase in the oxygen content of the AZO film as well as the uniformity of Ag layer. It was found that the multilayer film of AZO(35 nm)/Ag(13 nm)/AZO(35 nm) exhibited the resistivity of 2.16×10−4 Ω cm and an average transmittance of 81%.
Authors and Affiliations
Yuichiro Maeda, Yukio Yoshimura, Hikaru Hidaka, Atsushi Nitta
Keywords
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- EP ID EP393233
- DOI 10.9790/9622-0712060509.
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