MEM ACCELEROMETERS PRODUCTION TECHNOLOGICAL PROCESS SIMULATION
Journal Title: Вчені записки Таврійського національного університету імені В. І. Вернадського. Серія: Технічні науки - Year 2018, Vol 29, Issue 1
Abstract
On the article is proposed MEMS accelerometers production technological process simulation. The model will allow obtaining dynamic characteristics of the process and optimizing operations for improving the efficiency of the technological process. Simulation modeling was carried out, which showed the performance of the constructed model.
Authors and Affiliations
І. Ш. Невлюдов, Г. В. Пономарьова, В. О. Бортнікова
Keywords
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