Integrated structure for a resonant micro-gyroscope andaccelerometer
Journal Title: Frattura ed Integrità Strutturale - Year 2014, Vol 8, Issue 29
Abstract
This paper presents the study of the mechanical behavior of a microstructure designed to detectacceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by theThELMA© surface-micromachining technique, bases detection of two components of external acceleration (onein-plane component and one out-of plane component) and two components of angular velocity (roll and yaw)on the variation of frequency of several elements set in resonance. The device, despite its small dimensions,provides a differential decoupled detection of four external quantities thanks to the presence of four slenderbeams resonating in bending and four torsional resonators.
Authors and Affiliations
V. Zega, C. Comi, A. Corigliano
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