Integrated structure for a resonant micro-gyroscope andaccelerometer
Journal Title: Frattura ed Integrità Strutturale - Year 2014, Vol 8, Issue 29
Abstract
This paper presents the study of the mechanical behavior of a microstructure designed to detectacceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by theThELMA© surface-micromachining technique, bases detection of two components of external acceleration (onein-plane component and one out-of plane component) and two components of angular velocity (roll and yaw)on the variation of frequency of several elements set in resonance. The device, despite its small dimensions,provides a differential decoupled detection of four external quantities thanks to the presence of four slenderbeams resonating in bending and four torsional resonators.
Authors and Affiliations
V. Zega, C. Comi, A. Corigliano
Keywords
Related Articles
- EP ID EP105140
- DOI 10.3221/IGF-ESIS.29.29
- Views 51
- Downloads 0
A new formulation for estimating maximum stress intensity factor atthe mid plane of a SENB specimen: Study based on 3D FEA
In this investigation, three-dimensional elastic finite element analyses have been conducted tocompute the stress intensity factor (KI) in a SENB specimen with varied thickness (B) and crack-length to widthratio (a...
Process of cracking in reinforced concrete beams (simulation and experiment)
The paper presents the results of experimental and theoretical investigations of the mechanisms of crack formation in reinforced concrete beams subjected to quasi-static bending. The boundary-value problem has bee...
Spherical particles formation under biaxial cyclic loading due to mesotunneling effect
Fatigue fracture surfaces of Al-based alloys with fatigue striations pattern and such wear debris pattern as spherical particles were investigated fractographically, on the bases of the OG’e spectroscopic analysi...
Fatigue life prediction of casing welded pipes by using the extended finite element method
The extended finite element (XFEM) method has been used to simulate fatigue crack growth in casing pipe, made of API J55 steel by high-frequency welding, in order estimate its structural integrity and life. B...
On the application of the Theory of Critical Distances for prediction of fracture in fibre composites
This paper is concerned with the fracture of composite materials containing stress concentration features such as notches and holes. In particular, it addresses the question of the use of the Theory of Critical Distances...