Optimization of Geometry of Microfabricated Piezoelectric Actuator
Journal Title: INTERNATIONAL JOURNAL OF ENGINEERING TRENDS AND TECHNOLOGY - Year 2013, Vol 4, Issue 4
Abstract
This paper focuses on optimization of the geometry of piezoelectric actuator for maximization of output for applications such as micro-pump. The device structure consists of a piezoelectric disk/plate which is glued on the top of a silicon plate. Under various constraints the displacement or deflection of the silicon plate attached to the piezoelectric material plate is obtained from simulation and used for the analysis. For analysis purpose a circular and a square shaped silicon plate/membrane has been taken separately into consideration which are simulated under various size, shape and input excitations and the results are compared to determine the optimum dimension. For a 5 mm diameter/edge length silicon plate, the optimum diameter of circular PZT plate obtained is 4.6 mm, whereas, it is 4.1 mm edge length for square PZT plate
Authors and Affiliations
Souvik Sutradhar
Keywords
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