Abstract

Currently, electromechanical systems are widely used in technology. An important role is played by microsensors for measuring the values of physical parameters and converting them into electrical signals. The aim of the study is to determine the limits of applicability of analytical and numerical methods for calculating mechanical stresses and deflections of membranes when creating elements of pressure sensors. A numerical simulation of the corrugated membrane used in pressure sensors was carried out. The calculation was carried out in a geometrically and physically linear formulation using the ANSYS software and hardware complex. The results of the calculation were used to optimize the design in order to reduce the maximum equivalent stresses and increase the displacement of the center of the membrane. It has been determined that corrugated membranes play an important role in device operation. Since they depend on the accuracy of measurements and the reliability of the device, therefore, the degree of accuracy of their calculation should be as high as possible. After the experiment, it was established that plastic deformations still occur in structures, which is highly undesirable for elastic elements.

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