Sensitivity Analysis of Mems Based Ultrasonic Transducer by Simulation
Journal Title: International Journal for Research in Applied Science and Engineering Technology (IJRASET) - Year 2017, Vol 5, Issue 6
Abstract
The development of sophisticated technology sensors became part of our daily life. Sensors are now available which can work even in robust conditions but sensitivity factor is the one that is not allowing them to work in versatile fields of engineering applications. Applications like non-destructive technique, rock crushing, and dangerous gas sensing, and medical imaging require sensors that must be very sensitive and must even detect small changes in the parameter that needs to maintain precise control. Sensitivity factor is majorly influenced by the choice of materials that is considered for manufacturing of these sensors. Sophisticated technology led to development of micro sized sensors for medical field that are used in identification of different parts of fetus using ultrasonic technique. This paper focuses on the choice of composite materials that can be used for MEMS based transducer so as to bring better sensitivity in operation of the device. The present work reports the simulation and analysis of the susceptance results as a function of excitation frequency for the four lowest Eigen frequencies of the structure for different piezoelectric materials under test using COMSOL Multiphysics software.
Authors and Affiliations
Mahammad Firose Shaik, Naga Lakshmi Harisha A
Keywords
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