Simulation of Cantilever RF MEMS switch
Journal Title: International Research Journal of Applied and Basic Sciences - Year 2014, Vol 8, Issue 4
Abstract
the RF MEMS switches are series switches type and are designed using physical level approach by using 3D MEMS commercial software package, Intellisuite. These switch structures are first designed using 2D layout which then is converted to 3D model to simulate the actuation voltage. In this paper, we design and simulate RF MEMS switch in suspension cantilever mode. We chose the transmission line of type micro strip . High performance RF MEMS switch with low voltage actuation, 10 V was successfully designed and simulated.
Authors and Affiliations
Gholamhosein Moloudian*| Sama technical and vocational traning collage,Islamic Azad Universiy , kazeroun branch kazeroun, Iran, email: gholamhosein_movludian@yahoo.com, Mohammad Amin Pirbonyeh| Sama technical and vocational traning collage,Islamic Azad Universiy , kazeroun branch kazeroun, Iran
Keywords
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