Structure and Driving Principle of Piezoelectric Motor
Journal Title: Journal of Science and today’s world - Year 2013, Vol 2, Issue 3
Abstract
In this study, a novel automatic nano-alignment system using machine vision coupled with a piezoelectric motor for motion control was developed. The analytical algorithm of this visionaided auto-alignment design makes use of inputs of real-time movement captured by CCD to obtain the corresponding output feedback. Through matrix transformation, the algorithm establishes the characteristic matrix of the system. With the feed-in position of the tool, the difference between the fiducially mark and the target position can be obtained by image processing. Alignment commands can then be fed to the two-axis piezoelectric motor to compensate for the positional difference. Both theoretical deductions and experimental trials have proved that the novel automatic vision-aided alignment system is robust and feasible for achieving precision to the nanometer scale.
Authors and Affiliations
Abolghasem Zabihollah and Misagh Salehi
Keywords
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