The Method of Solid State Impurity Diffusion and Doping In 4H-SiC
Journal Title: International Journal of Fundamental Physical Sciences - Year 2013, Vol 3, Issue 4
Abstract
Solid state thermal diffusion is not a common method of impurity doping in silicon carbide (SiC) device fabrication due to the extremely high temperatures required for such a process to occur. We have recently reported that solid state impurity doping by thermal diffusion in SiC is possible if there is a parallel mechanism, such as oxidation or silicidation that creates silicon or carbon vacancies, which then allows dopant impurities to diffuse into these vacancies. This paper describes the experimental procedures by which oxidation and silicidation can be used to generate vacancies and enhance impurity doping at temperatures below 1400 ºC.
Authors and Affiliations
Suwan Mendis, Chin-Che Tin, Ilkham G. Atabaev, Bakhtiyar G. Atabaev
Keywords
Related Articles
- EP ID EP599189
- DOI 10.14331/ijfps.2013.330059
- Views 91
- Downloads 0
Suppressed Fluctuation In The Gabaergic Signaling: Mathematical Modeling Of The Neurotransmitter
The chemistry of the gamma-aminobutyric acid (GABA) had been established. However, the explanation on the interplay between GABA receptors antagonizes fundamental concept of the GABAergic Signaling. For example, glutamat...
Geotextiles and Study of Their Behavior on Sand Embankments
Today, soil reinforcement is applied as an effective and reliable way to increase the resistance of the soil mass. This method works in a variety of instruments to stabilize earthen dam, layers below the surface, the emb...
Existence of Positive Solutions for (p1-p2) - Laplacian System to Dirichlet Boundary Conditions
In this paper, we deal with the multiplicity of positive solutions for a class of (p , q)-Lalpacian system. Moreover, the author established suitable conditions under which, the problem has positive solutions.
A Modification In Behavior of Gases
Wave nature is a form of heat energy. Call it as heat energy wave. Heat energy wave holds some force which takes a great effect on the outer surface of molecules as well as takes effect in the behavior of gases. H...
Special Theory of Gravity New Millennium Theory
Gravity and time are necessarily related to each other. Gravity affects the measurement of time. In contrast, time to affects the measurement of gravity. Our imagination about the gravity is like this much, that the gra...