Thermocatalytic gas sensor based on palladium nanoparticles synthesized by spark ablation
Journal Title: Modern Innovations, Systems and Technologies - Year 2022, Vol 2, Issue 4
Abstract
We have demonstrated the possibility of fabricating thermocatalytic gas sensors with a catalytic layer based on palladium nanoparticles synthesized by spark ablation using palladium ingots with a purity of 99.96 wt. % as a feed material. The sensor was implemented using a commercially available MEMS platform based on thin glass ceramic membrane 50–60 µm thick with an integrated microheater. The formulated functional ink comprising synthesized nanoparticles with a concentration of about 25 wt. % was deposited on the opposite to the microheater side of a membrane with the use of SonoPlot GIX Microplotter II printing equipment. The obtained structure was annealed at a temperature of 400 °C to remove the organic binder from the dry residue of the deposited ink. As a result, the uniform layer of catalytically active material with a thickness of about 3 μm was obtained on the membrane surface. The sensor implemented based on two MEMS platforms (one with a catalytic layer, the second one without a layer) placed in the Wheatstone bridge circuit demonstrates high sensitivity to methane (50 mV per 1% of methane) at a total power consumption of about 350 mW. The achieved characteristics are comparable with that of commercial sensors manufactured by Figaro USA Inc., SGX Sensortech, Zhengzhou Winsen Electronics Technology Co.
Authors and Affiliations
I. S. Vlasov, D. V. Kornyushin, E. I. Kameneva, I. A. Volkov
Keywords
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- EP ID EP711165
- DOI 10.47813/2782-2818-2022-2-4-0501-0519
- Views 97
- Downloads 0
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