Tin-induced crystallization of amorphous silicon assisted by a pulsed laser irradiation
Journal Title: Semiconductor Physics, Quantum Electronics and Optoelectronics - Year 2017, Vol 20, Issue 4
Abstract
The process of tin-induced crystallization of amorphous silicon under the influence of different types of laser irradiation was investigated using the method of Raman scattering by thin-film Si-Sn-Si structures. The dependences of the size and concentration of Si nanocrystals on the power of laser radiation was experimentally evaluated and analyzed. As sources of excitation pulse laser radiation with the pulses duration equal to 20 ns and 150 s and wavelengths equal to 535 and 1070 nm was used. The possibility of efficient tin-induced transformation of silicon from amorphous phase to crystalline one in the 200-nm thick layers of a-Si under the action of laser pulses with duration equal to 20 ns was shown. The spatial and temporal distributions of laser induced temperature rise was calculated to interpret experimental results.
Authors and Affiliations
V. B. Neimash, V. V. Melnyk, L. L. Fedorenko, P. Ye. Shepeliavyi, A. S. Nikolayenko, M. V. Isaiev, A. G. Kuzmich
Keywords
Related Articles
- EP ID EP265205
- DOI 10.15407/spqeo20.04.396
- Views 83
- Downloads 0
An original way to obtain porous Zn(1–x)MgxO thin films by spray pyrolysis technique
Zn(1–x)MgxO thin films with various concentrations of magnesium were deposited using the spray pyrolysis method. The transmittance spectra recorded for all films exhibit maxima exceeding 90%. The band gap energy of the f...
Infrared and terahertz in biomedicine
A number of potential advances of infrared and terahertz technologies in application mainly to biomedicine is shortly discussed. In spite of the fact that there are a number well established imaging and spectroscopic tec...
Compositional studies of optical parameters in (Ag3AsS3)x(As2S3)1–x (x = 0.3; 0.6; 0.9) thin films
(Ag3AsS3)x(As2S3)1–x (x = 0.3; 0.6; 0.9) thin films were deposited onto a silica substrate by rapid thermal evaporation. The amount of Ag-rich crystalline phase precipitates on the surfaces of the films increases with Ag...
Nanocrystalline silicon carbide films for solar cells
Nanocrystalline silicon carbide (nc-SiC) films as protective coating and as solar cell material for a harsh environment, high temperatures, light intensities and radiation, were investigated. p- and n-types 100-mm silico...
Enhanced optical transmission of the triple-layer resonant waveguide structure
In this paper, we propose and demonstrate a novel guided-mode resonant filter based on a metallic grating sandwiched between two dielectric layers for TE polarization. A theoretical model based on rigorous coupled wave a...