DUAL-PORT SAW SENSOR WITH ZNO NANORODS AS SENSING ELEMENT
Journal Title: Сенсорна електроніка і мікросистемні технології - Year 2015, Vol 12, Issue 1
Abstract
Highly-sensitive dual-port SAW sensor on 128YX – LiNbO3 substrate with sensing element based on ZnO nanorods was proposed in the research. Low-temperature ZnO nanorods synthesis technology was developed, morphometric characteristics of ZnO nanorods were investigated by scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction analysis. Physical models of SAW sensor and SAW sensor with ZnO nanorods were built, sensitivity of such sensors was analyzed by finite element method. It was shown that SAW sensor had the sensitivity of 3.89·10-15 g/Hz to mass load, and sensitivity increased to 6.24·10-17 g/Hz on application of ZnO nanorods
Authors and Affiliations
V. Ulianova, A. Orlov, O. Bogdan, G. Pashkevich
Keywords
Related Articles
- EP ID EP399047
- DOI 10.18524/1815-7459.2015.1.104486
- Views 93
- Downloads 0
PHYSICS OF NANOTRANSISTORS: STRUCTURE, METRICS, AND CONTROL
The transistor is the key element of almost any electronic device. By the end of the 20th century, MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor) sizes had reached a nanoscale, and the nanotransistor itself w...
DATA PROCESSING SYSTEM OF DIGITAL TEMPERATURE SENSORS IN ORDER TO OPTIMIZE ENERGY COSTS OF SMART HOME
The aim of this work is the development of heat regime management of smart home, which satisfies conditions of comfort and economy. The investigation deals with the problem of minimization of payment of consumed energy f...
COMPUTATIONAL STRATEGY IN RATIONAL CHOICE OF FUNCTIONAL MONOMERS FOR "ARTIFICIAL RECEPTOR" SYNTHESIS ON MELAMINE
Geometric and energy characteristics of the pre-polymerisation complexes "functional monomer - template" in a vacuum, water and acetonitrile are investigated with density functional theory (DFT) method at RwB97XD/6-31G(d...
RELATIVISTIC APPROACH TO CALCUATION OF IONIZATION CHARACTERISTICS FOR RYDBERG ALKALI ATOM IN A BLACK-BODY RADIATION FIELD
The combined relativistic energy approach and relativistic many-body perturbation theory with the zeroth Dirac-Fock-Sham approximation are used for computing the thermal Blackbody radiation ionization characteristics of...
STRUCTURE AND OPTICALLY PROPERTIES OF THE ZNSO LAYERS PREPARED BY THERMAL OXIDATION OF ZNS THIN FILMS
We have grown ZnS thin films by means of the radiofrequency (RF) magnetron sputtering technique onto c-Al2O3 and Si substrates at a temperature of 300°С. An effect of thermal annealing on air in a temperature range from...