GAS ANALISIS SYSTEM BASED ON THE POROUS SILICON STRUCTURES
Journal Title: Сенсорна електроніка і мікросистемні технології - Year 2018, Vol 15, Issue 2
Abstract
A matrix of gas-sensitive elements based on the porous silicon nanostructures was created. The influence of the adsorption of water molecules, ammonia, methane, and ethanol on the impedance of sensory structures was studied. The increase in sensitivity and selectivity of the sensors was revealed in result electrochemical deposition of palladium and zinc oxide nanoclusters on the porous silicon surface. The system for identifying of gas and determining its concentration in the air was created on the basis of the received sensory elements and the use of information technologies. The cross-sectional characteristics of the sensors were used to identify the gas. The obtained results broaden the prospects of application of the porous silicon nanostructures in sensor devices.
Authors and Affiliations
L. S. Monastyrskii, I. B. Olenych, O. I. Petryshyn, V. M. Lozynskyi
Keywords
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- EP ID EP399973
- DOI 10.18524/1815-7459.2018.2.136891
- Views 49
- Downloads 0
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