Recent Trends and Advancements in the field of Micro Electrical and mechanical Systems (MEMS) Technology
Journal Title: International Journal of Mechanical and Production Engineering Research and Development (IJMPERD ) - Year 2017, Vol 7, Issue 6
Abstract
The use of Micro Electrical and Mechanical Systems (MEMS) in the field of electrical and mechanical based domains is becoming the brains of micro devices day by day. This paper represents about the recent trends that MEMS concept has been profoundly used. MEMS sensors technology has been used in the various domains such as engineering, medical & space equipment, telecommunication RF systems, bio technology etc..,By this paper we have shown some of the technologies already existed in each domain which will give the immense cutting edge enhancements, improvements in research and shows the need of MEMS concept in the field of research. The development of MEMS technology will be integrating the mechanical and electrical systems into the single base which will be the building blocks for the overall equipment.
Authors and Affiliations
Mathew Alphonse, R. Ramesh Kumar, M. Senthil Kumar
Keywords
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