SEMICONDUCTOR INTEGRATED ELEMENTS BASED ON NANOSTRUCTURES SILICON FOR INFORMATION SYSTEMS
Journal Title: Сенсорна електроніка і мікросистемні технології - Year 2015, Vol 12, Issue 1
Abstract
In this paper we consider the accelerometer sensor, which is made using the combined technology of silicon-on-insulator and silicon nanowires. On its basis a fast-response, high-speed, highly sensitive to acceleration and displacement a device was developed with submicron and topological nanometer dimensions. This made it possible to implement as a discrete device or element of nanoelectromechanical systems integrated with the structure of silicon-on-insulator, which provides control of movement with an accuracy of 200 nm
Authors and Affiliations
A. A. Druzhinin, I. T. Kogut, A. Yu. Khoverko, V. I. Golota, Yu. M. Khoverko
Keywords
Related Articles
- EP ID EP399082
- DOI 10.18524/1815-7459.2015.1.107702
- Views 84
- Downloads 0
NEW BALANCE APPROACH TO THE MODELING OF MACROTURBULENT ATMOSPHERIC DYNAMICS, SPATIAL DISTRIBUTION OF RADIONUCLIDES IN THE GLOBAL ATMOSPHERE, THEIR ENVIRONMENT IMPACT AFTER THE NUCLEAR ACCIDENT AT FUKUSHIMA NUCLEAR POWER PLANT
We present the elements of a new advanced non-stationary theory of global mechanisms in atmospheric low-frequency processes, teleconnection effects to modelling global atmospheric behaviour, dispersion of radionuclides,...
WAYS OF THE OPTICO-ELECTRONIC SENSOR INTELLECTUALIZATION
In the work one of effective methods of optico-electronic sensor intellectualization which is based on the comparison, analysis and processing of the aprioristic and current information on investigation object is describ...
RELATIVISTIC APPROACH TO CALCUATION OF IONIZATION CHARACTERISTICS FOR RYDBERG ALKALI ATOM IN A BLACK-BODY RADIATION FIELD
The combined relativistic energy approach and relativistic many-body perturbation theory with the zeroth Dirac-Fock-Sham approximation are used for computing the thermal Blackbody radiation ionization characteristics of...
QUANTUM-CHEMICAL INVESTIGATIONS OF RUBRENE COMPLEXES WITH STEARIC ACID AND POLYMETHYLMETACRYLATE IN PREDICTION OF LANGMUIROGENICITY
The results of quantum chemical studies of the energy of interaction between the molecules of rubrene and stearic acid, as well as rubren and polymethyl methacrylate (PMMA) are presented. Studies have shown that rubrene...
GENERALIZED ELECTRON TRANSPORT MODEL FOR MICRO- AND NANOELECTRONICS
Generalized model of electron transport in the linear response regime developed by R. Landauer, S. Datta, and M. Lundstrom with application to the resistors of any dimension, any size and arbitrary dispersion working in...