Structural and Tribological Aspects on Ti (C,O,N) Magnetron Reactive Sputtered Thin-Films
Journal Title: Analele Universitatii "Dunarea de Jos" din Galati. Fascicula IX, Metalurgie si Stiinta Materialelor - Year 2007, Vol 30, Issue 2
Abstract
Magnetron sputtering is a flexible technique and allows producing a significant amount of types of coatings. Within the frame of present work, Ti-C-O-N thin films were deposited onto high-speed steel (AISI M2), substrates by reactive dc magnetron sputtering in a laboratory-size deposition system. It consisted of two vertically opposed rectangular magnetrons, in a closed field configuration. The films were prepared using dc power source on a titanium target (99.6 at.%). A gas atmosphere composed of argon (working gas), acetylene and nitrogen/oxygen (17:3) reactive mixture was used for the depositions. In terms of structure, the samples produced only with ethylene and argon flow reveal a TiC structure (NaCl type). The decrease of Ф(C2H2)/Ф(O2+N2) induces amorphisation, but TiC structure, with possible N and O inclusions, is still detected. In terms of tribological aspects, the static friction coefficient and roughness (Rz) were analyzed and discussed depending of composition and structure.
Authors and Affiliations
Daniel MUNTEANU, Camelia OLTEANU, Cristian IONESCU, Alexandru MUNTEANU, Filipe VAZ, Luis CUNHA
Keywords
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