ESTIMATION OF SHAPE OF AFM TIP WITH “CROSS-FORREST” CALIBRATION STANDARD
Journal Title: Journal of Machine Construction and Maintenance - Year 2018, Vol 111, Issue 4
Abstract
The “Cross-Forrest” tip shape calibration standard for regularized blind tip reconstruction has been fabricated and investigated. The confirmation of previously reported theoretical findings is shown. However, the KSVD-OMP algorithm of images denoising has been extended by additional group sparsity penalty and Shi Tomasi corner detection algorithm with 100 nm size window for cross concave corners needed to be applied. The comparison of SEM direct tip imaging with 3D shapes reconstructed on the basis of filtered and unfiltered AFM images are shown and the qualitative agreement has been confirmed. The optimization of fabrication technology of “Cross-Forrest” structure is required to allow quantitative tip shape measurements. It should limit the uncertainty of the initial shape of an AFM tip, and the resulting uncertainty of final shape which is the improved version of the initial one.
Authors and Affiliations
Grzegorz JÓŹWIAK, Magdalena MOCZAŁA-DUSANOWSKA, Krzysztof GAJEWSKI, Andrzej SIERAKOWSKI, Piotr WÓJCICKI
Keywords
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- EP ID EP614568
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