Kinetics of Fragmentation During Annealing in Vacuum of Titanium Nanofilms Deposited Onto Non-Metallic Materials
Journal Title: Фізика і хімія твердого тіла - Year 2017, Vol 18, Issue 2
Abstract
The results are presented of the study of kinetics of fragmentation of titanium nanofilms 100 nm thick deposited onto the surface of samples made from single crystals of Al2O3(leucosapphire), ZrO2, SiC, and AlN ceramics and annealed in vacuum at temperatures 1300 16000C with different exposition times at each temperature within 2 - 20 min range.
Authors and Affiliations
Yu. V. Naydich, I. I. Gab, T. V. Stetsyuk, B. D. Kostyuk, D. B. Shakhnin
Keywords
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- EP ID EP264062
- DOI 10.15330/pcss.18.2.158-165
- Views 41
- Downloads 0
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